doi: 10.3850/978-981-11-0749-8_686
Towards Real Time Effective Dimensional Verification of High Throughput Nano-Embossing Manufacturing
M. Calaon1, P. Chamberlain2, M. H. Madsen3, D. Hardt2, G. Tosello1 and H.N. Hansen1
1Department of Mechanical Engineering, Technical University of Denmark, Kgs. Lyngby, Denmark
2Laboratory for Manufacturing and Productivity Massachusetts Institute of Technology, Cambridge, USA
3Danish Fundamental Metrology A/S, Kgs. Lyngby, Denmark
Abstract
The growing demand to manufacture, with high accuracy, structures enabling medical diagnostic tests on polymer disposable devices introduces the needs to improve manufacturing technology including in-line quality verification. This paper focuses on hot embossing as a process suitable to replicate nano test structures on thermoplastic substrates. A metrological approach based on calibrated AFM measurements allows for process optimization and equipment calibration. Bulk deformation measurements are used as a surrogate for dimensional variation of the replicated test structures to enable real time cycle-to-cycle process and product dimensional control. Scatterometry measurements were performed to demonstrate future possibilities for in-line post process nano-scale dimensional quality control.
Keywords: Hot micro/nano-Embossing, Nano Metrology, Nanofluidics, Finger Print Test Structures.
