doi:10.3850/978-981-08-7920-4_S2-S107-cd
A Study on Floor Micro-Vibration in High Technology Factories
Lee Chien-Liang1, Su Kai-Leung1 and Wang Yen-Po2
1Department of Civil Engineering, The University of Hong Kong, Hong Kong.
2Department of Civil Engineering, Nation Chiao-Tung University, Hsinchu, Taiwan.
ABSTRACT
This study explores vertical floor micro-vibration induced by the automated guided vehicles
(AGVs). AGVs move on multiple long-span production floors in TFT-LCD fabs, where many
vibration-sensitive tools are installed. A simplified method is proposed here to assess AGVinduced
floor vibration, which has rarely been taken into account in the design stage. The statespace
procedure (SSP) is adopted to compute theAGV-induced floor vibration as it preserves the
desired numerical stability and accuracy in high frequency responses. The dynamic analysis of
a AGV moving on an equivalent three-span beam model of a TFT-LCD building is simulated by
taking into account various AGV speeds and engine forces. Numerical simulations demonstrate
that if proper engine forces and excitation frequency contents of theAGVmoving loads are used,
the peak AGV-induced floor micro-vibration level can be predicted by the proposed method.
Moreover, the effectiveness of vibration control by span-reduction as well as energy-dissipation
by viscoelastic (VE) dampers is also examined. In comparison with span-reduction, application
of energy dissipation devices is more effective in vibration suppression as they enhance the
damping characteristics of the multi-span floor system whose natural frequencies are potentially in
resonance with the excitation frequencies of the AGV moving loads ranging in a broadband width.
Keywords: Micro-vibration, Automated guided vehicle (AGV), State space procedure, Damper, Vibration control, Moving loads.
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