Ceramic microsystems offer, due to the fact, that the ceramic or glass-ceramic material they consist of, is of high mechanical stability and chemical inertness, distinctive advantages. The possibility to realize electrical, mechanical and fluidical functionality within one manufacturing technology, combined with the possible use of various functional materials, e.g. for sensing and acting functions, further enlarges their application potential. Ceramic microsystems can quite advantageously be realized by multilayer technology, such as LTCC (Low Temperature Cofiring Ceramics) technology, which represents an established technology for manufacturing of high reliability electrical microcircuits, but which is also well suited for the realization of quite complex mechanical 3D structures in combination with high-density electrical circuitry. The current paper presents examples of ceramic microsystems, and discusses applicable manufacturing techniques, both traditional and rather new, or yet more or less not widely used ones, such as laser processing and embossing. Promising combinations of technologies, such as that of lamination and moulding processes, which have recently been developed and applied, will be covered. The discussion includes qualitative and functional as well as economic aspects.